Model Description
                           
Specification Description
Upper table surface(mm) 160X160
Bottom table surface(mm) 230X200
Height(mm) 86
Repetitive positioning accuracy (μm) ±3
Positioning accuracy (μm) 40
Stroke (mm) ±10 (starting from the home position)
Rotation angle (°) ±7.5 (starting from the home position)
Screw diameter (mm) φ12
Screw lead (mm) 2
Linear orbit Integrated
Flatness (mm) ±0.035
Parallelism of motion (mm) ±0.045
Horizontal load capacity (kgf) 15
Body material Aluminum alloy
Surface treatment Anode black
Body weight (kg) 6.5±2%
Motor model Inovance 100W (provided by customer)
Driver model Servo driver (provided by customer)
Sensor PM-L25